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and other effects
It is intended to apply to polished wafers as specified in SEMI M1
This Guide provides minimum definitions for site utilities needed to support the UPW system
This Standard establishes a Specific Equipment Model (SEM) for AMHS storage equipment (Stocker SEM)
Referenced SEMI StandardsSEMI C1 — Guide for the Analysis of Liquid Chemicals
S01000 - SEMI S10 - リスクアセスメントおよびリスク評価プロセスのための安全ガイドライン StdPbc-0425 and other effectsNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI EHS Referenced SEMI Standards (purchase separately) SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment SEMI S14 Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor